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CHEE 587 Chemical Processing: Electronics Industry (3 credits)

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Note: This is the 2021–2022 eCalendar. Update the year in your browser's URL bar for the most recent version of this page, or .

Offered by: Chemical Engineering (Faculty of Engineering)

Overview

Chemical Engineering : Introduction to semiconductors and elementary semiconductor devices. Chemical processes and unit operations in the manufacture of microelectronic components with emphasis on silicon chip fabrication, fundamentals of crystal growth, photolithography, deposition of thin films, dopant diffusion, plasma and chemical etching, packaging. Safety and environmental concerns. Sustainability practices in this industry.

Terms: Winter 2022

Instructors: Berk, Dimitrios (Winter)

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