The Nanotools facility at 不良研究所 is a state-of-the-art 150mm-compatible laboratory that offers a comprehensive suite of high-performance equipment for micro- and nano-technology development. Equipped with both standard and specialized micro- and nanofabrication tools, the facility supports advanced laboratory research activities across various disciplines. Its experienced staff provides expertise in process development, ensuring effective support for diverse research needs. The facility is organized into four core areas aligned with key technologies: lithography, etching, thin-film deposition, and measurement and control.